测量系统

Keyence VR 5200

Model: VR-5200
Type: Measuring Head
Light Sources
Observation light source: LED ring light (red, blue, green)
Measurement light source: White LED
Control Unit: VR-5000
Observation and Measurement Range
Macro Mode
Magnification (based on a 15-inch monitor) 12×:
Horizontal 24.0 mm
Vertical 18.0 mm
Magnification (based on a 15-inch monitor) 25×:
Horizontal 12.0 mm
Vertical 9.0 mm
Magnification (based on a 15-inch monitor) 38×:
Horizontal 8.0 mm
Vertical 6.0 mm
Magnification (based on a 15-inch monitor) 50×:
Horizontal 6.0 mm
Vertical 4.5 mm
Micro Mode
Magnification (based on a 15-inch monitor) 40×:
Horizontal 7.6 mm
Vertical 5.7 mm
Magnification (based on a 15-inch monitor) 80×:
Horizontal 3.8 mm
Vertical 2.9 mm
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Magnification (based on a 15-inch monitor) 120×:
Horizontal 2.5 mm
Vertical 1.9 mm
Magnification (based on a 15-inch monitor) 160×:
Horizontal 1.9 mm
Vertical 1.4 mm
Zoom: 1× to 4×
Height Measurement
Measurement resolution: 0.1 µm
Height Measurement Range
Without Z image composition
Macro mode: 10 mm
Micro mode: 1 mm
With Z image composition
Macro mode: 50 mm
Micro mode: 30 mm
Repeatability (σ)
Without Z image composition: 0.4 µm
With Z image composition: 1.0 µm
Measurement Accuracy
Without Z image composition: ±2.5 µm
With Z image composition: ±4.0 µm
Width Measurement
Repeatability (σ)
Macro mode: 1 µm
Micro mode: 0.5 µm
Measurement Accuracy
Macro mode: ±5 µm
Micro mode: ±2 µm
Image Composition
Fully automatic measurement (automatic XY control + automatic Z focus),
automatic assignment, automatic area setup
Measurable XY range: 206 × 104 mm
Object Table
XY travel: 184 × 88 mm (motorized)
Z travel: 73 mm (motorized)
Load capacity: 4.5 kg
Working distance: 75 mm
Image Sensor
4-megapixel CMOS, B/W
Transmitter Lens
Dual telecentric lens ×2
Receiver Lens
Dual telecentric lens
Data Processing
Dedicated PC as per KEYENCE specifications (Operating system: Windows 11 Pro)
Power Supply
Voltage: 100 to 240 V AC, 50/60 Hz
Power consumption: Max. 200 VA
Environmental Resistance
Operating temperature: 15 to 30°C
Relative humidity: 20 to 80% RH (no condensation)
Weight: Approx. 28 kg (net measuring unit weight approx. 11 kg)

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