测量系统

Keyence IM 7010

Model IM-7010, Model Year 2018
Type: Measuring Head
Model with Transmitted and Reflected Light
Image Sensor: B/W CMOS, 1", 6.6 megapixels
Display: LCD Monitor, 10.4" (XGA: 1024 × 768)
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Lens System: Dual Telecentric Lens
Image-based Measurement
Measuring Range:
- Standard Measuring Mode: 200 mm × 200 mm (4 × R50)
- Precision Measuring Mode: 125 × 125 mm
Display Resolution: 0.1 µm
Repeatability (without stage movement):
- Standard Measuring Mode: ±1 µm
- Precision Measuring Mode: ±0.5 µm
Repeatability (with stage movement):
- Standard Measuring Mode: ±2 µm
- Precision Measuring Mode: ±1.5 µm
Measurement Accuracy (±2σ):
- Without stage movement:
- Standard Measuring Mode: ±5 µm*1
- Precision Measuring Mode: ±2 µm*2
- With stage movement:
- Standard Measuring Mode: ±(7 + 0.02l) µm*3
- Precision Measuring Mode: ±(4 + 0.02l) µm*4
External Remote Input: Voltage-free input (with and without contact)
External Output: I.O./N.G./FAIL/MEASUREMENT
Photo-MOS Output: Rated load 24 V DC, 0.5 A, ON-resistance max. 50 mΩ
Interfaces:
- LAN: RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
- USB 3.1: 4 ports (rear)
- USB 2.0 Type A: 2 ports (front)
Recording: 500GB Hard Drive
Illumination System - Transmitted Light: Telecentric transmitted light illumination (green LED)
Ring Illumination: Reflected light (ring light) with four segments
XY Stage: Travel range 100 × 100 mm (motor-driven), max. load capacity 5 kg
Z Axis: Travel range 75 mm (motor-driven)
Power Supply: 100 to 240 V AC, 50/60 Hz, max. power consumption 430 VA
Environmental Resistance:
- Pollution Degree: 2
- Overvoltage Category: II
- Ambient Temperature: +10 to +35 °C
Relative Humidity: 20 to 80% RH (non-condensing)
Weight: approx. 30 kg

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