测量系统

Zeiss EVO MA 15 Rasterelektronenmikroskop

• Used device with upgraded cathode systems
o LAB6 cathode
o Tungsten cathode
• EDX (Energy Dispersive X-ray Spectroscopy) allowing direct chemical analysis in the SEM
• Lens-mounted 5-channel BSD
• Infrared camera mounted on the chamber door
• Maintenance by manufacturer (Zeiss and Oxford Instruments) until 2024
• 2x 19” flat screen monitors
• Joystick controller for stage movement
• Ergonomically designed control console
• Software module for automatic centering of any image detail
• Stage base plate, motorized X+Y axes
• Stage assembly includes tilt, rotation, and Z-axis; removable

Accessories
• Transport lock and transport castors
• 2x Wehnelt + anode + 3 tungsten filaments
• Table spacers (3 pieces, different heights) + tools
• 1x 9-position sample holder for rods
o Collimator shorts 150
o Collimator long etc. 150
o Collimator long 50/80 mm² MK2
• 1x fixed aperture holder
• 2x 100 μ VP – aperture
• 1x 750 μ VP – aperture
• 2x 20 μ aperture
• 1x 30 μ aperture
• 1x 100 μ aperture
• Various tools (tool kit) and sealing rings
• 1x Lens-mounted 5-channel BSD (1 EVO BSD DIODE 5 CH Standard, low light sensitivity. With signs of use, possibly for replacement)
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AZtec Adv Rec. 3.2 + Update 2024

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