Pfeiffer C590 PVD 蒸发溅射系统

Pfeiffer C590

Opportunity:

2x Pfeiffer Classic 590 available!

Price: EUR 99.500/piece.

Configuration Coater 1:


2x Pfeiffer TPH 2301 (2300ls) completely overhauled
Pfeiffer DCU 600
2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc

Notes: Currently used for Resistance Evaporation (no boats available)


Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)




Configuration Coater 2:


2x Pfeiffer TPH 2201 s p c (horizontal turbo 2200ls) completely overhauled
Pfeiffer DCU 600
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2x VAT Throttle Valve 64048-pe48-ads2/0001
1x Pfeiffer PKR251 fullrange sensor
Pfeiffer TPR280 for prevacuum
Pfeiffer DUO 120 prepump (120m3/h)
Vacuumchamber:
for substrate size round 840mm
incl shielding and spare shielding set
2x viewport
Several feedthroughs
Rotating feedthrough incl thermocouple
Infrared heater
Watermanifold plus valves
Vacuumvalves for venting-pumpdown etc

Notes: Current used for Resistance Evaporation (no boats available)

Current PLC and E-cabinet is removed due to IP. However: if required our company Orange Thin Films can do a complete refurbishment with Labview automation and new processes (such as Eeam-Sputtering-Evaporation etc)