三坐标测量机

Keyence LM 1100

LM-1100
Type
Head
Image Sensor
Monochrome CMOS, 1", 20 megapixels
Display 10.4" LCD monitor (XGA: 1024 × 768)
Lens
Double-sided telecentric lens
Image-Based Measurement
Field of View
Wide-field measurement mode 225 mm × 125 mm
High-precision measurement mode 206 mm × 106 mm
Display Resolution 0.1 µm
Repeatability
Within camera field of view (2σ)
Wide-field measurement mode ±0.5 µm
High-precision measurement mode ±0.1 µm
With object stage movement
X/Y axis ±0.9 µm
X/Y plane
Measurement Accuracy
Within camera field of view (2σ)
Wide-field measurement mode ±2 µm*1
High-precision measurement mode ±0.7 µm*2
With object stage movement
X/Y axis (EUX, MPE, EUY, MPE)
±(1.8 + 0.02L) µm*3
X/Y plane (EUXY, MPE)
±(2.8 + 0.02L) µm*3
AF Height Measurement
Repeatability ±2 µm
Measurement accuracy (EUZ, MPE) ±(4.8 + 0.04L) µm*4
External Remote Input
Potential-free input (contact and non-contact)
External Output
PASS/FAIL/FAILED/MEASUREMENT
PhotoMOS Output
Rated load 24 V DC, 0.5 A
ON resistance max. 50 mΩ
Interface
LAN
RJ-45 (10BASE-T/100BASE-TX/1000BASE-T)
USB 3.1
2 ports (rear: 2)
USB 2.0 Type A
4 ports (front: 2, rear: 2)
Monitor Output DVI-D
Storage
Hard disk 500 GB
Illumination System
Transmitted light
Telecentric transmitted light illumination
Ring
Multi-angle illumination with four segments (electrical, white LED)
Low-angle illumination (directional, electrical, green LED)
Telecentric coaxial illumination
External Lighting Control
Light volume control PWM control, 100 kHz
Output voltage 12 V DC
Max. output current 1.6 A
XY Object Stage
Travel range 200 mm × 100 mm (motorized)
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Max. load capacity 7 kg
Z Object Stage
Travel range 75 mm (motorized)
Power Supply Voltage 100 to 240 V AC ±10% (50/60 Hz)
Power Consumption max. 430 VA
Environmental Resistance
Ambient temperature +10 to 35°C*5
Relative Humidity 20 to 80% RH (no condensation)
Overvoltage Category II
Pollution Degree 2
Weight Approx. 30 kg

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