测量系统

Alicona InfiniteFocusXL200 G5

Alicona InfiniteFocusXL200 G5 Measuring System

Positioning Volume: 200 mm × 200 mm × 200 mm
Maximum Workpiece Weight: 30 kg
Objective Magnifications: 2.5x, 5x, 10xHX, 10x, 20xHX, 20x, 50x, 100x
Numerical Aperture: 0.075–0.8
Working Distance: 4.5–37 mm
Lateral Measuring Range: 5.63 mm to 0.16 mm
Vertical Resolution: 2300 nm to 10 nm
Measurement Noise: 800 nm to 1 nm
Vertical Measuring Range: 8–36 mm
Measuring Speed: up to 1.7 million measurement points/s
Minimum Measurable Roughness Ra: 7 µm to 0.03 µm
Minimum Measurable Roughness Sa: 3.5 µm to 0.015 µm
Minimum Measurable Height: 2.3 µm to 0.01 µm
Maximum Measurable Area: up to 40,000 mm²
Flatness Accuracy: 0.1 µm (10x objective)

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