巴尔查斯 BAK 642 溅射系统

Balzers

For the deposition of thin metallic layers in the nanometer range, of different materials, cathodes chrome and copper,1 chamber, rotating basket, pre-pump set, turbo pump, hot and cold water supply for heating and cooling of the plant,
Cooling plant L&R Kältetechnik WHK-15-W, year of construction: 2004,
High voltage source ADS Maris,
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control cabinet, with control Siemens, complete plant control retrofit, year of construction: 2004